The controller selects and adjusts composition of the gas and flow rate according to contaminants present within the ion beam, or lack thereof, as well as total or partial pressure analysis.
该控制器根据存在于该离子束内的污染物、或是不存在该污染物的情形、以及总压或分压分析来选择与调整该气体的组成以及流速。
The controller selects and adjusts composition of the gas and flow rate according to contaminants present within the ion beam, or lack thereof, as well as total or partial pressure analysis.
该控制器根据存在于该离子束内的污染物、或是不存在该污染物的情形、以及总压或分压分析来选择与调整该气体的组成以及流速。
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