Apparatus for blanking a charged particle beam a beam blanking unit (1) comprises first and second blanking plates (2, 3) mounted to a support plate (15).
用来屏蔽带电粒子束的设备。射束屏蔽单元(1)包括固定到支撑板(15)的第一和第二屏蔽板(2,3)。
Apparatus for blanking a charged particle beam a beam blanking unit (1) comprises first and second blanking plates (2, 3) mounted to a support plate (15).
用来屏蔽带电粒子束的设备。射束屏蔽单元(1)包括固定到支撑板(15)的第一和第二屏蔽板(2,3)。
应用推荐