This paper describes a laser beam quality analyzer based on CCD, computer and MATLAB. The detailed composition, basic function and characteristics of the software are presented.
介绍了利用CCD、计算机并基于MATLAB开发的激光光束质量分析的软件，详细地介绍了该软件的组成、实现的基本功能及其特点。
An analyzer magnet and ion implanter including the magnet pole are also provided so that a method of improving low energy ion beam space charge neutralization in an ion implanter is realized.
本发明亦提供一分析器磁铁以及包括前述磁极的离子布植机，因此实现了一改良一离子布植机中的低能量离子束空间电荷中和的方法。
An analyzer magnet and ion implanter including the magnet pole are also provided so that a method of improving low energy ion beam space charge neutralization in an ion implanter is realized.
本发明亦提供一分析器磁铁以及包括前述磁极的离子布植机，因此实现了一改良一离子布植机中的低能量离子束空间电荷中和的方法。
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