By using the Monte Carlo method, we calculate the spatial resolution of the scanning electron microscope using low loss energy and coaxial backscattered electrons.
用蒙特卡罗方法模拟计算了利用高能同轴背散射电子的扫描电子显微镜的空间分辨率。
By using the Monte Carlo method, we calculate the spatial resolution of the scanning electron microscope using low loss energy and coaxial backscattered electrons.
用蒙特卡罗方法模拟计算了利用高能同轴背散射电子的扫描电子显微镜的空间分辨率。
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