Because the image of backscattered electron could reveal structure of the mark as well as the surface, we chose the backscattered electron signal to detect the position of the mark.

由于背散射电子信号的图像既可以显示样品的形貌也可以显示样品的成分所以选择背散射电子信号进行标记位置检测。

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Because the image of backscattered electron could reveal structure of the mark as well as the surface, we chose the backscattered electron signal to detect the position of the mark.

由于背散射电子信号的图像既可以显示样品的形貌也可以显示样品的成分所以选择背散射电子信号进行标记位置检测。

youdao