The method solves the problems that an osmium membrane prepared from the prior art is easy to crack, and the measuring accuracy of atomic oxygen is low.
本发明解决了现有工艺制备锇膜存在容易开 裂、原子氧测量的准确性差的问题。
The method solves the problems that an osmium membrane prepared from the prior art is easy to crack, and the measuring accuracy of atomic oxygen is low.
本发明解决了现有工艺制备锇膜存在容易开 裂、原子氧测量的准确性差的问题。
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