• Typical of the dopant chemistry is the reaction for arsine, which is depicted with the deposition process in Fig. 9.

    化三氢反应典型掺杂化学反应,9显示了反应的淀积过程

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  • This article provides the synthesis methods of high purity Arsine by arse nic, zinc and sulfuric-acid. The purity is 99.995%. Total yield reaches 85%.

    介绍了用硫酸合成高纯砷烷方法,产品纯度99.995%,收率为85%。

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  • The phosphine and arsine absorb the ultraviolet light much more strongly than does silane, causing them to be deposited out on the walls of the container.

    磷化氢砷化三氢紫外光吸收强烈,因此,它们沉积容器的壁上。

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  • A dual absorbing tower shower containing oxidant and alkaline absorbant was used for removing arsine, phosphorus, sulfur, fluorine, chlorine and oxynitrides.

    椭圆型喷吸收氧化剂吸收治理半导体工业废气中氮氧化物及各种酸

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  • A dual absorbing tower shower containing oxidant and alkaline absorbant was used for removing arsine, phosphorus, sulfur, fluorine, chlorine and oxynitrides.

    椭圆型喷吸收氧化剂吸收治理半导体工业废气中氮氧化物及各种酸

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