Therefore, more and more semiconductor factories apply advanced control policies for AMHS systems.
因此，越来越多的半导体制造厂更加重视AMHS系统的控制策略。
This research starts with the review of historic evolution of AMHS, then focused on more details of the AMHS structure and control method between all subsystems of AMHS.
本文从AMHS系统的历史演变过程开始，详细的分析了AMHS系统地构成结构和各子系统间的控制方式的特点。
This research starts with the review of historic evolution of AMHS, then focused on more details of the AMHS structure and control method between all subsystems of AMHS.
本文从AMHS系统的历史演变过程开始，详细的分析了AMHS系统地构成结构和各子系统间的控制方式的特点。
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