本文采用能量统计分布方法研究微机械悬臂梁的噪声模型，对热机械噪声理论模型进行了拓展和修正，使之适用于低温和高频条件。
A modified model of thermal-mechanical noise is developed to make it adaptable to the micromechanical cantilever in high frequency or low temperature.
本文采用能量统计分布方法研究微机械悬臂梁的噪声模型，对热机械噪声理论模型进行了拓展和修正，使之适用于低温和高频条件。
A modified model of thermal-mechanical noise is developed to make it adaptable to the micromechanical cantilever in high frequency or low temperature.
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