介绍了一种新型金刚石高温压力传感器的优化设计方法。
Optimum design considerations for poly diamond piezoresistive pressure sensors are demonstrated.
单晶硅soi高温压力传感器是一种新型高性能高温压力传感器。
High temperature SOI Monocrystal silicon pressure sensor is a new type high temperature pressure sensor with high performances.
列举了几种多晶硅高温压力传感器的热灵敏度漂移补偿方法，并分别讨论了它们的原理及特点。
Several compensation methods of thermal sensitivity shift of polysilicon pressure sensor are introduced, whose principles and characteristics are discussed.
根据模拟结果并结合单晶硅材料和SOI结构的特点，设计出了矩形应力膜单晶硅soi高温压力传感器芯片。
According to the result of simulation and characteristic of monocrystalline silicon SOI structure, a novel high temperature SOI pressure sensor with a rectangle diaphragm was designed.
介绍了四甲基氢氧化铵(TMAH)溶液的腐蚀特性，论述了在单晶硅和多晶硅高温压力传感器的制作过程中，TMAH腐蚀液在浓硼终止腐蚀和各向异性硅杯腐蚀两个制作工艺中的应用。
Application of TMAH solutions which is used as etchant in boron etch-stop and anisotropic etching process in the manufacturing of single-crystal and polysilicon pressure sensors is mainly discussed.
介绍了四甲基氢氧化铵(TMAH)溶液的腐蚀特性，论述了在单晶硅和多晶硅高温压力传感器的制作过程中，TMAH腐蚀液在浓硼终止腐蚀和各向异性硅杯腐蚀两个制作工艺中的应用。
Application of TMAH solutions which is used as etchant in boron etch-stop and anisotropic etching process in the manufacturing of single-crystal and polysilicon pressure sensors is mainly discussed.
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