通过低温退火，可以获得质量优于高温退火的顶部硅层。
The quality of top silicon layer formed by anneal at low temperature may be better than that at high temperature.
二次衬砌顶部脱空已成为比较严重的隧道质量通病。
The separation on the top of secondary liner is one of the common failures of tunnel.
二次衬砌顶部脱空已成为比较严重的隧道质量通病。
The separation on the top of secondary liner is one of the common failures of tunnel.
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