光刻过程中由于光的衍射效应产生的非线性畸变对光刻面形质量具有严重影响,是造成光刻微结构图形失真的主要原因之一。
Nonlinear distortion caused by diffraction in the lithography process has severely affected the quality of surface profile, which is the main reason for pattern distortion in lithography.
理论分析表明,该现象可以用光克尔效应和热光非线性效应共同作用下的附加相位孔对入射光束的衍射行为来解释。
This phenomenon can be explained by the diffraction effect of the Gaussian beam from the laser induced phase hole in the nonlinear medium caused by Kerr effect and thermo optic effect.
相对论自聚焦的基本方程包括非线性源项和衍射的影响。
The basic equations for relativistic self-focusing include the nonlinear source term and the effect of diffraction.
利用菲涅耳基尔霍夫衍射积分和非线性近轴波动方程,在远场近似及光学薄近似条件下,得出了位相调制产生“热像”出现的位置及强度满足的解析关系。
According to the Fresnel-Kirchhoff diffraction integral and nonlinear paraxial wave equation, we derive the functional relationship of the intensity of hot image and its location.
通过原子波之间非线性耦合相互作用,这种结构可以表现为物质波光栅,对其周期的原子波产生衍射现。
Through the nonlinear coupling interactions between atomic waves, the structure appears as the matter wave gratings, and diffracts its surrounding atomic waves.
结果表明:除了非线性强度、吸收外,衍射是另一个影响非线性超声束冲击波形成的重要因素。
The results reveal that besides the nonlinearity and absorption, the diffraction is another important factor that affects the shock formation of an ultrasound beam.
结果表明:除了非线性强度、吸收外,衍射是另一个影响非线性超声束冲击波形成的重要因素。
The results reveal that besides the nonlinearity and absorption, the diffraction is another important factor that affects the shock formation of an ultrasound beam.
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