介绍了一种新型的、利用并联梳齿结构驱动的静电型微继电器及其制造工艺。
A novel electrostatic microrelay with parallel-comb drive structure and its fabrication process were presented.
介绍静电复印机AC驱动器的维修经验并提出用固态继电器对原电路进行改进的方法。
Introduced the repair-experience of the AC driver of the electrostatic printer and proposed the method to improve the primary circuit with the solid-state armature.
此双稳态机构可与电磁驱动、电热驱动和静电驱动等类型的微驱动器联用构成永磁双稳态MEMS微继电器。
With electromagnetic, electrothermal, and electrostatic micro actuators, this bistable structure can be applied to permanent magnet bistable MEMS relay.
此双稳态机构可与电磁驱动、电热驱动和静电驱动等类型的微驱动器联用构成永磁双稳态MEMS微继电器。
With electromagnetic, electrothermal, and electrostatic micro actuators, this bistable structure can be applied to permanent magnet bistable MEMS relay.
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