介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。
The driving mode, the advantage and disadvantage upon micro-actuator, the traits, applications and the principle of electrostatic comb-drive are introduced.
介绍了一种新型的、利用并联梳齿结构驱动的静电型微继电器及其制造工艺。
A novel electrostatic microrelay with parallel-comb drive structure and its fabrication process were presented.
静电梳齿微驱动器因其结构简单、功耗低、灵敏度高、受温度影响小，成为硅微陀螺仪的主要驱动方式。
Silicon micromachined gyroscope is mainly driven by electrostatic comb-finger actuator which has advantages of simple structure, low power supply, high sensitivity and not susceptible to temperature.
静电梳齿微驱动器因其结构简单、功耗低、灵敏度高、受温度影响小，成为硅微陀螺仪的主要驱动方式。
Silicon micromachined gyroscope is mainly driven by electrostatic comb-finger actuator which has advantages of simple structure, low power supply, high sensitivity and not susceptible to temperature.
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