为提高灵敏度和线性，该加速度计采用静电力反馈闭环控制方式，检测与处理电路采用高精度双极线性电路工艺进行了工艺流片。
To improve sensitivity and linearity, feedback loop was adopted with electrostatic in detection and managing circuit, which is fabricated with high precision bipolar linear circuit technology.
本文详细介绍了微机械静电伺服加速度计的系统工作原理、结构和线路设计特点，并对其封装样品作了简要的叙述。
This paper gives the operation principle, the structure and the circuit system designs of the micromachined electrostatic servo accelerometer, and briefly describes its packaged sample.
这个程序可以计算静电力使结构发生的变形，可以计算加速度作用时微加速度计的输出电压。
The subroutine can be used to calculate the deformation of structures subjected to electric field, and the output voltage of micro-accelerometer subjected to acceleration.
为了对微加速度计进行静电-机械耦合场分析，利用ANSYS软件及它的编程语言APDL实现了有限元耦合场分析。
A finite element approach, so called coupled-field analysis, has been developed by ANSYS and APDL to solve the problem of electrostatic-mechanical analysis for micro-accelerometers.
为了对微加速度计进行静电-机械耦合场分析，利用ANSYS软件及它的编程语言APDL实现了有限元耦合场分析。
A finite element approach, so called coupled-field analysis, has been developed by ANSYS and APDL to solve the problem of electrostatic-mechanical analysis for micro-accelerometers.
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