用热等静压法烧结制备了高导电性ZAO（铝掺杂氧化锌）陶瓷靶材，并用直流磁控溅射法制备出ZAO透明导电薄膜。

Aluminum-doped zinc oxide (ZAO) ceramic targets for sputtering were fabricated by hot isostatic pressing (HIP) and ZAO transparent conducting thin films were prepared by dc magnetron sputtering.

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采用新的铝掺杂方法，降低了氧化锌晶须电阻率，研究了铝掺杂对氧化锌晶须电阻率的影响。

New doping method has been found to decrease the surface resistance and volume resistance of the zinc oxide whiskers. The influence of Al-doping on the resistance of zinc oxide whiskers was studied.

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采用新的铝掺杂方法，降低了氧化锌晶须电阻率，研究了铝掺杂对氧化锌晶须电阻率的影响。

New doping method has been found to decrease the surface resistance and volume resistance of the zinc oxide whiskers. The influence of Al-doping on the resistance of zinc oxide whiskers was studied.

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