层间绝缘膜覆盖铁电电容器。
An interlayer insulating film covers the ferroelectric capacitor.
本发明属于半导体器件技术领域，具体为一种高密度电荷存储的新型铁电电容器及其制作方法。
The invention belongs to the technical field of semiconductor devices, in particular to a novel ferroelectric condenser for storing high density charge and method for preparation.
铁电电容器形成在衬底上并由一叠层体制成，该叠层体由依次叠置的下电极、电容器铁电膜和上电极构成。
A ferroelectric capacitor is formed above a substrate and made of a lamination of a lower electrode, a capacitor ferroelectric film and an upper electrode stacked in this order.
模拟结果表明，改进模型能够更精确地预测MF IS电容器铁电层的极化行为、电容器的C -V特性及记忆窗口。
The simulation results show that the improved model can predict the polarization behavior of ferroelectric layer, the C-V characteristic and memory window of MFIS capacitor more accurately.
模拟结果表明，改进模型能够更精确地预测MF IS电容器铁电层的极化行为、电容器的C -V特性及记忆窗口。
The simulation results show that the improved model can predict the polarization behavior of ferroelectric layer, the C-V characteristic and memory window of MFIS capacitor more accurately.
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