着重分析了钽酸锂薄膜材料的新制备技术,以及在热释电红外传感器应用方面的研究现状;
The recent researches of the new preparation technologies of the LiTaO3 thin film and its applications in pyroelectric infrared sensors are summarized in detail.
用醋酸锂和乙醇钽作为起始反应物,通过溶胶凝胶工艺生成了对红外敏感的钽酸锂薄膜,并详细讨论了基于钽酸锂薄膜的红外探测器件制备工艺。
The LiTaO3 thin film was chosen as infrared sensing film and prepared by a sol-gel process using lithium acetate and tantalum ethoxide as starting materials.
用醋酸锂和乙醇钽作为起始反应物,通过溶胶凝胶工艺生成了对红外敏感的钽酸锂薄膜,并详细讨论了基于钽酸锂薄膜的红外探测器件制备工艺。
The LiTaO3 thin film was chosen as infrared sensing film and prepared by a sol-gel process using lithium acetate and tantalum ethoxide as starting materials.
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