多晶硅薄膜的制备方法很多,主要有化学气相沉积法、激光结晶法、金属诱导晶化法等。
Poly-Si can be produced by laser crystallization of a-Si, metal-induced crystallization of a-Si, and many other methods.
多晶硅薄膜的制备方法很多,主要有化学气相沉积法、激光结晶法、金属诱导晶化法等。
Poly-Si can be produced by laser crystallization of a-Si, metal-induced crystallization of a-Si, and many other methods.
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