介绍了一种装置尾气处理的新工艺，即用重力沉降室除去尾气中的固体颗粒物，再用活性炭吸附处理尾气中的HF气体。
This paper discussed one new way to treat exhaust gas in test equipment. Firstly wipe off the solid granule of exhaust gas by gravity sedimentation chamber, then absorb the gas of HF by active carbon.
沉降室是利用粉尘颗粒的重力沉降作用而使粉尘从气体中分离出来的除尘装置。
The precipitator is the dust removal installment used the element of the dust pellet gravitational settling function which rests from the gas separates.
沉降室是利用粉尘颗粒的重力沉降作用而使粉尘从气体中分离出来的除尘装置。
The precipitator is the dust removal installment used the element of the dust pellet gravitational settling function which rests from the gas separates.
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