对垂直腔面发射激光器的湿法腐蚀技术、选择氧化工艺、合金工艺等关键工艺进行了研究，得到了最佳工艺条件。
We have explored technologies for the fabrication of VCSELs, such as wet etching, wet and selective oxidation and annealing.
对垂直腔面发射激光器的湿法腐蚀技术、选择氧化工艺、合金工艺等关键工艺进行了研究，得到了最佳工艺条件。
We have explored technologies for the fabrication of VCSELs, such as wet etching, wet and selective oxidation and annealing.
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