介绍了与高密度等离子体工艺相关的模型和数值模拟方法，即连续流和动力学方法。
Methods in modeling and numerical simulation for the high density plasma processing are introduced, namely, continuous and kinetic methods.
介绍了与高密度等离子体工艺相关的模型和数值模拟方法，即连续流和动力学方法。
Methods in modeling and numerical simulation for the high density plasma processing are introduced, namely, continuous and kinetic methods.
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