文中主要介绍了利用单板机TP801编制的控制输片系统动作及测量工件台定位精度的软件。
Software for controlling transport system and measuring stage positioning accuracy programmed by TP801 single board computer is presented in the paper.
文中主要介绍了利用单板机TP801编制的控制输片系统动作及测量工件台定位精度的软件。
Software for controlling transport system and measuring stage positioning accuracy programmed by TP801 single board computer is presented in the paper.
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