随超精密装备加工精度和生产率的不断提高，直线气浮系统得到广泛重视和研究。

With the increasing demands for higher accuracy and higher productivity of the ultra-precision equipments, ultra-precision gas bearing stage systems driven by linear motor become research hotspots.

youdao

随超精密装备加工精度和生产率的不断提高，直线气浮系统得到广泛重视和研究。

With the increasing demands for higher accuracy and higher productivity of the ultra-precision equipments, ultra-precision gas bearing stage systems driven by linear motor become research hotspots.

youdao