同时采用质量流量控制器、单片机为主体的电路控制系统。
The circuit control system consists of a mass flow controller and a CPU mainly.
热式传感器有很大的滞后环节，在数字质量流量控制器中需要对传感器数据进行补偿。
The thermal sensor had a large lag phase, so the data got by the sensor of digital mass flow controller should be compensated in advance.
具体地说，提供用来补偿流动路径和质量流量控制器的压力环境中的压力瞬变现象的方法和系统。
In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
研究分析了基于质量流量控制器、可编程序控制器和触摸屏的自动控制系统气体流量自动控制方法。
The MOCVD system is specifically introduced, and the gas flow automatic control method based on the mass flow controller(MFC) and programmable logic controller(PLC) is studied and analyzed.
介绍了一种新型的调压式流量控制方法，即通过气路安装质量流量控制器的方法对液路流量进行控制。
A new type of indirect flow control method shows that liquid flow can be controlled with a mass flow controller on the squeeze air system.
质量流量控制器的性能可能易受在与控制流体流动的控制器耦合的流动路径中的压力瞬变现象的影响。
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow.
本文介绍气体质量流量控制器的工作原理和在岩心渗透率测试中的应用，以及影响其测试性能的几个因素。
This paper introduce gas Mass Flow Controller principle of operating application for core permeability detection and some factors that influence its test performance.
该便携式湿度发生器利用分流法湿度发生原理，采用微控制器和质量流量控制技术实现了自动发生不同流量、不同露点气体的功能，可为露点测试仪检定和校准提供动态标准湿度气体。
The portable humidity generator had the function of automatic generating standard gas of different flow and dewpoint by using the microprocessor and the technology of mass flow controlling.
该便携式湿度发生器利用分流法湿度发生原理，采用微控制器和质量流量控制技术实现了自动发生不同流量、不同露点气体的功能，可为露点测试仪检定和校准提供动态标准湿度气体。
The portable humidity generator had the function of automatic generating standard gas of different flow and dewpoint by using the microprocessor and the technology of mass flow controlling.
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