文中介绍硅微机械谐振真空传感器的特点及配套研制的真空计。
This paper presents the characteristics of silicon micromachining resonance vacuum sensor and a vacuum meter utilizing this sensor.
文中介绍硅微机械谐振真空传感器的特点及配套研制的真空计。
This paper presents the characteristics of silicon micromachining resonance vacuum sensor and a vacuum meter utilizing this sensor.
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