提出了一种微机械谐振式压力传感器的新结构。
在谐振器动力学分析的基础上，系统地比较了谐振式压力传感器检测速度谐振频率和检测位移谐振频率的优缺点。
Based on dynamic analysis of resonator, speed resonant frequency detection for the resonant pressure sensor is compared to displacement resonant frequency detection systematically.
基于MEMS技术的硅微谐振式压力传感器是目前精度最高的硅微压力传感器，它通过检测物体的固有频率间接测量压力，为准数字信号输出。
Miniature silicon resonant pressure sensor based on MEMS, which has the highest precision for frequency output, measures pressure by detecting the natural frequency of some object.
研究了微电容式压力传感器的差动电容结构设计和微谐振式压力传感器的微谐振子结构设计，利用ANSYS软件对微差动电容的结构进行了优化设计。
A micro differential capacitance and a micro harmonic oscillator are studied and designed. The structure of the micro differential capacitance is optimized by use of the ANSYS software.
本文研究了谐振式硅微结构压力传感器在单频激励和双频激励情况下的非线性振动特性。
The nonlinear vibration characteristics of resonant silicon microstructure pressure sensor are investigated under single and two frequency excitation signal conditions.
本文介绍了作者设计、制作的一种谐振梁式压力传感器。
This thesis represents the design and fabrication of a resonant beam pressure sensor.
本文介绍了作者设计、制作的一种谐振梁式压力传感器。
This thesis represents the design and fabrication of a resonant beam pressure sensor.
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