本文用几何光学描述了离轴探测调焦误差信号与系统参数的关系，并与实验结果进行了比较。
Characteristics of the defocusing error signals are expressed in the terms of an off-axial detection system by geometric optics. The results are compared with experiment.
本文重点讨论了曲面光刻的关键技术——自动调焦系统，并对曲面工艺及光刻线条进行实验分析。
The study of this dissertation analyses the focus system technology, which is the key technology of curve plane surface lithographic fabrication techniques.
实验结果表明，在外场工作条件下，应用该系统对静止目标和多数运动目标均能获得良好的调焦效果。
Experimental results show that the system can realize good focus to immobile targets and most mobile targets in the working environment.
详细描述了神光装置激光聚变物理实验靶瞄准定位系统的原理和结构，提出了“空间坐标法”进行靶定位和靶瞄准，利用“离焦定半径”完成了激光调焦。
We use a space coordinate method to position and point the target and align the laser beam, and use an off-focus radius-finding technique to find the laser focus.
实验结果表明，本系统调焦曲线与理想曲线拟合度较好，拍摄已知运动轨迹的目标，达到了满意效果。
Finally the result given by experiment shows that the curve of adjusting focus is fit well with the ideal curve. Shooting the goal of the known movement orbit has reached the satisfactory result.
实验结果表明，本系统调焦曲线与理想曲线拟合度较好，拍摄已知运动轨迹的目标，达到了满意效果。
Finally the result given by experiment shows that the curve of adjusting focus is fit well with the ideal curve. Shooting the goal of the known movement orbit has reached the satisfactory result.
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