与试验设计方法相结合，提出了一个用于集成电路工艺实时统计分析的方法。
A real time statistical analysis methodology of IC manufacturing process in combination with an experimental design is presented.
与试验设计方法相结合，提出了一个用于集成电路工艺实时统计分析的方法。
A real time statistical analysis methodology of IC manufacturing process in combination with an experimental design is presented.
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