该试剂进料流包括共沉积试剂与选择性硅去除试剂的混合物。

The reagent feed stream comprises a mixture of codeposition reagents and a selective silicon removal reagent.

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该试剂进料流包括共沉积试剂与选择性硅去除试剂的混合物。

The reagent feed stream comprises a mixture of codeposition reagents and a selective silicon removal reagent.

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