利用压电薄膜和表面微机械技术可实现新型的氧化锌簿膜器件。
A new type of zine oxide (ZnO) thin film devices can be realized utilizing piezoelectric and surface micromachine technology.
采用表面微机械加工技术允许多达近100精细的应用在一个芯片上的电路图案层的应用。
Using surface micromachining techniques allows applications of up to nearly 100 finely applied layers of circuit patterns on one chip.
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。
Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.
多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。
Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.
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