表面微加工工艺采用两种晶体硅芯片基板作为赖以建立层的基础，或者可以在更便宜的玻璃或塑料基板启动。
The surface micromachining process uses either crystal silicon chip substrates as a foundation upon which to build layers, or can be started on cheaper glass or plastic substrates.
用表面硅微加工工艺研制了一种用于薄膜热容测量的新型微桥量热计。
A micro bridge calorimeter fabricated with silicon surface micro-fabrication technology is developed for testing heat capacity of thin films.
介绍了激光表面微造型新工艺新方法，对机械密封环端面进行跨尺度的几何形貌加工工艺研究。
A new technology of laser surface micro-molding is introduced, and the mechanical face seal ring cross-scale processing of the geometric shape is researched.
作者在玻璃上进行微磨料水射流微细槽加工的实验基础上，对微磨料水射流加工的表面形貌、材料冲蚀去除机理及加工工艺性能进行了研究。
This paper presents a study of using micro-abrasive water jet for the machining of micro-channels on brittle glasses. The erosion mechanism, surface pattern and process performance are studied.
适当地控制加工工艺参数，在低压下，微磨料水射流加工是一种用于脆性材料上微细通道的加工切实可行的方法，并可获得良好的加工表面质量。
With proper control of the operating parameters, this technology can be used for machining micro-channels on brittle materials with high quality of surface finish.
适当地控制加工工艺参数，在低压下，微磨料水射流加工是一种用于脆性材料上微细通道的加工切实可行的方法，并可获得良好的加工表面质量。
With proper control of the operating parameters, this technology can be used for machining micro-channels on brittle materials with high quality of surface finish.
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