表面微加工工艺采用两种晶体硅芯片基板作为赖以建立层的基础，或者可以在更便宜的玻璃或塑料基板启动。
The surface micromachining process uses either crystal silicon chip substrates as a foundation upon which to build layers, or can be started on cheaper glass or plastic substrates.
重点研究了加工单晶材料时晶向对临界切深、微切削力和表面粗糙度的影响；
The crystallographic effects on critical depth, micro cutting forces and surface waviness when machining single crystals are emphatically investigated.
如果刀具参数选取得当，能在常规切削用量下获得在玻璃的塑性域内形成的、无微裂纹的加工表面。
Crack-free surface that is formed in ductile regime of glass can be obtained under conventional cutting conditions if the tool parameters are chosen properly.
仿真结果表明，采用微定位工作台进行在线振动补偿，可有效地提高加工工件的表面质量。
The simulation results show that the machining accuracy of the workpiece can be effectively improved by utilizing the micro-positioning workpiece table to implement dynamic compensation.
在生产领域，激光可以用来钻孔、切割、连接、硬化以及进行表面改性和微加工。
In the area of manufacturing, lasers are used for drilling, cutting, joining, hardening, surface modification and micromachining.
用表面硅微加工工艺研制了一种用于薄膜热容测量的新型微桥量热计。
A micro bridge calorimeter fabricated with silicon surface micro-fabrication technology is developed for testing heat capacity of thin films.
用一个由恒微测力并经精确校准的气浮LVDT 传感器和相应软硬件组成的测量系统对非球面加工工件表面进行在机测量。
The On line measurement of aspheric workpiece surface is made by using a precise calibrated, low force, air bearing LVDT and the measuring system composed of corresponding software and hardware.
另外，激光表面微造型技术以其制造加工速度快、对环境无污染以及优良的形状和尺寸控制能力被认为是表面微造型领域成功的造型方法。
Laser surface texturing(LST) has been the most successful way in surface texturing because of its good performance such as high speed, non pollution and excellent control ability for shape and size.
作者在玻璃上进行微磨料水射流微细槽加工的实验基础上，对微磨料水射流加工的表面形貌、材料冲蚀去除机理及加工工艺性能进行了研究。
This paper presents a study of using micro-abrasive water jet for the machining of micro-channels on brittle glasses. The erosion mechanism, surface pattern and process performance are studied.
介绍了激光表面微造型新工艺新方法，对机械密封环端面进行跨尺度的几何形貌加工工艺研究。
A new technology of laser surface micro-molding is introduced, and the mechanical face seal ring cross-scale processing of the geometric shape is researched.
针对激光陀螺反射镜常用材料微晶玻璃的加工技术，介绍了一种较为成熟的超光滑表面加工方法—定偏心浸液式抛光。
Nano-particle colloid jet polishing is a new kind of ultra-precision machining technology which has important research and application value in fabricating ultra smooth surface.
适当地控制加工工艺参数，在低压下，微磨料水射流加工是一种用于脆性材料上微细通道的加工切实可行的方法，并可获得良好的加工表面质量。
With proper control of the operating parameters, this technology can be used for machining micro-channels on brittle materials with high quality of surface finish.
采用JXA-840A分析了微加工形貌，表明微腔（槽）表面留有一层致密的硬化层，且与基体结合良好。
The micro-structure of cutting grooves was analyzed with JXA-840A. It is found that the treated layers of grooves have a fine hardness property and good joining strength with the base metal.
采用JXA-840A分析了微加工形貌，表明微腔（槽）表面留有一层致密的硬化层，且与基体结合良好。
The micro-structure of cutting grooves was analyzed with JXA-840A. It is found that the treated layers of grooves have a fine hardness property and good joining strength with the base metal.
应用推荐