本文介绍离子注入技术对气敏材料表面层组分、结构、电导率及气敏特性进行改性的研究进展。
In this paper we introduce the researches on ion implantation. modification of surface layer composition, construction, conductivity and gas sensitive characterization of gas sensitive materials.
本文介绍离子注入技术对气敏材料表面层组分、结构、电导率及气敏特性进行改性的研究进展。
In this paper we introduce the researches on ion implantation. modification of surface layer composition, construction, conductivity and gas sensitive characterization of gas sensitive materials.
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