首先对MEMS表面加工工艺进行了详细的分析，采用面向过程的方法建立了表面工艺过程的统一模型。
Based on the detailed analysis of MEMS surface micromachining process, the data model of surface micromachining process was built by the process oriented method.
一个完整的MEMS表面加工工艺pcm系统应当包括三个部分：电学参数提取、几何学参数提取和材料特性参数提取。
An entire PCM system of MEMS surface manufacturing process should include three parts: electronic parameters extraction, geometric parameters extraction and material property parameters extraction.
磨削强化技术是利用磨削加工过程中产生的大量磨削热对工件材料进行表面热处理的新工艺技术。
The grinding strengthen technology is a new process engineering of surface heat-treatment, which uses a mass of grind heat produced in grinding process to handle workpiece materials.
气囊式抛光技术是一种新颖的先进抛光工艺方法，能实现光学表面的确定性加工。
Bonnet tool polishing is a novel and advanced polishing method, which can realize quantitative removing of optical surface.
珩磨未完：珩磨表面的缺陷，磨加工过的表面通过珩磨工艺没有变得足够光洁。
Hone not FINISHED: Defect on honed surface; finish ground surface not cleaned up adequately by the honing operation.
利用该测量系统对不同材质、不同加工工艺的物体表面的激光反射分布进行了初步的测量和分析。
Primary measurements and analysis of surface reflectance of varied substance along with various machining process are carried out with this system.
提出齿轮的表面质量对其使用性能和寿命有着极为重要的影响，并详细论述了脉冲电化学机械齿轮光整工艺，及其加工后的齿轮的表面质量特性。
This paper points out that a gear's surface quality has important influence on its employment performance, and pulse-electrochemical mechanical finishing in gear machining is discussed in detail.
极间间隙是对脉冲电化学光整加工具有重要影响的工艺参数，保持极小的极间间隙加工，可以提高工件的表面光泽度以及加工的尺寸精度。
Interelectrode clearance is one of the most important parameter of it, keeping minimal clearance while machining will improve the part's surface gloss and size accuracy.
工艺试验证明，上述变化可导致高加工精度、高表面质量和高效率。
It has been proved by technology experiments that the above alternations result in high machining accuracy, better surface quality and good profit.
在滚压加工工艺中，滚压套的压下量大小决定了滚压力的大小并决定了细长轴表面发生弹塑性变形的状况，从而决定了细长轴的加工质量。
In the process of rolling, the movement of rolling sets decide the rolling pressure, the deformation of the spindly shaft and consequently the rolling quality.
在托轮轴的加工工艺中，对钢轨表面的中频感应淬火是一道关键工序，淬火处理的质量决定了托轮轴的使用效果和寿命。
Processing technology to shore up the axle, the right rail Induction surface hardening is a key process, quenching determines the quality of care dealing with the use of effects and life axle.
初步讨论矿物表面特征、微孔结构与矿物晶体结构、化学成分以及加工工艺、性能之间的联系。
The relationship between surface characteristics, micropore structure and minerals structure, chemical components as well as processing technologies and properties is discussed.
磨削淬硬是利用未淬硬钢零件磨削加工中产生的热—机械复合作用直接对其进行表面形变淬火的新工艺。
A new surface deformation quenching process which utilized the composite thermal and mechanical effects generated in grinding to harden the surface of work-piece is introduced.
用表面硅微加工工艺研制了一种用于薄膜热容测量的新型微桥量热计。
A micro bridge calorimeter fabricated with silicon surface micro-fabrication technology is developed for testing heat capacity of thin films.
可根据材料的特性及技术要求，通过改变工艺参数得到理想的加工表面。
Process parameters were found to obtain optimum effect of surface hardening, according to material property and technology requirement.
用大量的实践经验论述了加工出合格的表面形貌对珩磨头、设备工艺参数和珩磨油石条、珩磨介质对珩磨质量关键性的影响。
Much practice experience demonstrates that in order to get qualifiedmachining surface, the machine tool, process data, honing stone as well as honing oil are very critical.
试验结果表明：采用小直径刀具，合适的工艺参数，次摆线分层走刀方式能加工出高质量的型腔表面。
The experimental results showed that high quality of cavity surface can be obtained by using appropriate technologic parameter and trochoidal milling mode with micro-end mill cutter.
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
对加工工艺有丰富的知识，如机加工，锻造，注塑，热处理和表面处理等工艺。
Good knowledge about manufacturing process, such as machining, forging, injection molding, heat treatment and surface treatment, etc.
对难加工材料的切割实验表明：复合工艺能较大幅度地提高加工效率，改善表面质量，降低断丝概率。
The cutting experiments for difficult to machine materials have shown that the cutting rate can be increased much more, the surface quality improved and the probability of wire breaking reduced.
介绍了采用电解一射流加工法在油管外壁表面加工标记（号）的基本原理及其过程，通过实验总结出了较为合理的工艺规范。
The basic theory and process for machining marks (code) on the outer wall of pipe with electrolyse-jet are introduced. A reasonable process rule is thus given experimentally.
并根据设计的硬币花纹工艺试验表明，选择较高的主脉冲频率，可获得较小的加工间隙，进而获得良好的表面质量。
It is indicated from the process experiment of coin figure that smaller gap and higher surface quality are obtained by choosing higher main pulse frequency.
硅片键合往往与表面硅加工和体硅加工相结合，用在MEMS的加工工艺中。
The silicon bonding technology is generally combined with surface silicon machining and bulk silicon machining in MEMS.
珩磨加工正逐步成为现代制造单元中所必须的重要组成部分。文中提出珩磨工艺参数的合理选择依据，从工艺上保证了珩磨加工表面质量。
Honing process is increasingly becoming a vinal part in modern manufacturing units. The rational selection of honing parameters is provided to guarantee the honed surface quality.
这种磨削加工工艺有一定的优势，但同时会在被加工表面留下往复振荡的痕迹及出现磨削力的波动较大等现象和问题。
This grinding has its merits, but its force fluctuates greatly and the trace of vibration appears on the surface of the camshaft.
但采用传统磨削工艺加工这些材料很难得到良好的表面质量。
But the well surface of these materials ground was achieved difficultly with common grinding.
在研究表面光整加工方法的基础上，提出了一种液流悬浮研抛加工的新工艺方法。
Based on the research of the finishing machining process of the surface, a new polishing technique, the hydrodynamic suspension polishing was proposed.
研究表明，叉轴式强力滚磨加工技术是改善大中型盘类零件表面质量、提高使用性能的理想工艺。
The synthetical results show that skew spindle high pressure finishing is proved to be an ideal technology to improve large and middle size disc_type part′s surface and performance.
研究表明，叉轴式强力滚磨加工技术是改善大中型盘类零件表面质量、提高使用性能的理想工艺。
The synthetical results show that skew spindle high pressure finishing is proved to be an ideal technology to improve large and middle size disc_type part′s surface and performance.
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