本文介绍了在AFM针尖与氢钝化硅表面之间施加电场作用对硅表面进行修饰的纳米加工方法，重点讨论了加工机理。
In the paper a kind of patterning method was studied with voltage applied between the AFM tip and sample with emphasis on its mechanism.
本文介绍了在AFM针尖与氢钝化硅表面之间施加电场作用对硅表面进行修饰的纳米加工方法，重点讨论了加工机理。
In the paper a kind of patterning method was studied with voltage applied between the AFM tip and sample with emphasis on its mechanism.
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