本文介绍了一种新型的基于改进傅科聚焦探测法且自带衍射光栅计量系统的非接触式位移传感器。
This paper presents a new non-contact displacement sensor with diffraction grating metrology system based on an improved Foucault focus detection method.
本文介绍了一种新型的基于改进傅科聚焦探测法且自带衍射光栅计量系统的非接触式位移传感器。
This paper presents a new non-contact displacement sensor with diffraction grating metrology system based on an improved Foucault focus detection method.
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