作为波分复用中最关键的器件，蚀刻衍射光栅(EDG)是平面波导密集波分复用器件中很有发展潜力的一种。
As the key device of a DWDM system, Etching Diffraction Grating (EDG) is one of the most potential types of planar waveguide DWDM devices.
本文提出了用等离子体蚀刻法提高浮雕全息光栅衍射效率的原理和方法。
The principle and method to improve the diffraction efficiency of relief holographic gratings by plasma etch is presented in this paper.
本文提出了用等离子体蚀刻法提高浮雕全息光栅衍射效率的原理和方法。
The principle and method to improve the diffraction efficiency of relief holographic gratings by plasma etch is presented in this paper.
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