给出了一种MEMS薄膜材料参数的在线测试技术与方法。

A new system for the in situ extraction of the material parameters of MEMS films is presented.

youdao

给出了一种MEMS薄膜材料参数的在线测试技术与方法。

A new system for the in situ extraction of the material parameters of MEMS films is presented.

youdao