实现高速沉积对于薄膜微晶硅太阳电池产业化降低成本是一个重要手段。
To realize high deposition rate is an important problem in low-cost industrialization of microcrystalline silicon solar cells.
本文对VHFPECVD制备的本征微晶硅薄膜和电池进行了电学特性和结构特性方面的测试分析研究。
The electrical and structural properties of microcrystalline silicon thin film and solar cells fabricated by VHF-PECVD were studied.
本文对VHFPECVD制备的本征微晶硅薄膜和电池进行了电学特性和结构特性方面的测试分析研究。
The electrical and structural properties of microcrystalline silicon thin film and solar cells fabricated by VHF-PECVD were studied.
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