根据弹性力学原理，基于应变不匹配，提出了一种可以预测薄膜残余应力分配的理论模型计算方法，并将计算结果与干涉仪测量值进行了对比。
Based on the principle of elasticity and strain misfit, a new calculation method of theoretical model to predict the residual stress distribution on optical thin films is put forward in this paper.
根据弹性力学原理，基于应变不匹配，提出了一种可以预测薄膜残余应力分配的理论模型计算方法，并将计算结果与干涉仪测量值进行了对比。
Based on the principle of elasticity and strain misfit, a new calculation method of theoretical model to predict the residual stress distribution on optical thin films is put forward in this paper.
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