薄膜应力对薄膜性能具有重要的影响。
Influence of thin film stress is very significant on thin film properties.
薄膜应力的测量一直是一个困难的问题。
The measurement of thin film stress is always a problem with great difficulty.
考虑了梁元的轴向应力和板元的薄膜应力的影响。
Both stresses due to the axial action of the beam and the membrane action of the plate are considered.
这有助于计算容器的一次薄膜应力和二次弯曲应力。
This is useful in evaluating the primary membrane stress and the secondary bending stress in vessels.
本发明可消除薄膜应力，提高薄膜与塑胶基底间的结合力。
The invention can carry-off membrane stress, which improves the binding force of thin film and plastic rubber background.
有关薄膜应力的一般测量方法存在精度不高和不能实时测量的缺点。
The measurement of stress change in thin film by Substrate Curvature method is introduced in this paper.
论文还研究了不同退火工艺条件对薄膜应力的影响，可以实现薄膜低温退火。
The affection of different annealing process conditions on TiN film stress is also researched, low temperature annealing of film can be realized.
最后将错位相移器应用于集成电路硅片薄膜应力分布测试仪及错位电子散斑干涉仪之中。
This technic has been used in the instrument of IC wafer Stress Analyzer and Shear Electronic Speckle Pattern Interferometry (SESPI).
主要介绍了薄膜应力形成机理和应力实验的研究进展，并探讨了薄膜应力研究的发展趋势。
The progress of thin film stress development mechanisms and stress experimental study is introduced. The dominant direction of the study of thin film stress is discussed.
薄膜应力和折射率的改变主要是由于Y2O3含量的改变使得薄膜结构发生了变化引起的。
Moreover, the variations of residual stress and the shifts of refractive index correspond to the evolution of structures induced by the addition of Y2O3.
本文介绍一种利用长焦距显微镜观察玻璃薄片由镀膜淀积引起的形变来测量薄膜应力的方法。
This paper introduces a method for the measurement of stress of thin film. In this method a long focal distance microscope is used and deformation of the thin film on thin glass sheet is observed.
实验中观察到的规则的自相似网状纳米结构，显示了薄膜应力弛豫过程中自组织生长的分形特征。
The regular nano network structure in the morphology of the samples shows the fractal characteristics of the self-organized growth in the strain relaxation process.
为使半导体产品达到所要求的光学、电子和机械性能，必须实时地在沉积过程中直接测量薄膜应力。
In order to meet the requirements of optical, electronic and mechanical performance of semiconductor products, it is necessary to measure thin film stress during the deposition.
微机械薄膜应力对MEMS器件有较大的影响，因此应力测量对于工艺监控和MEMS器件设计是必须的。
Internal stresses in micromachined thin films have a great influence on the properties of MEMS devices. Measurement of stresses in the films is critical for process monitoring and MEMS design.
介绍了一种基于多光束原理的薄膜应力测试方法，通过对反射光光点间距变化的检测，可以实时得到应力的信息。
A new method based on multi - beam to measure the stress of optical thin film is introduced the stress can be obtained by measuring the relative distances between the reflected light spots.
本文以纳米压痕法结合量纲分析及有限元方法来测量薄膜材料的应力-应变关系。
In this master thesis, the stress-strain relationships of thin films were measured by nanoindentation combined with dimensional analysis and finite element method.
氧分压和沉积速率对YSZ薄膜残余应力的影响。
Influences of Oxygen Partial Pressure and Deposition Rate on Residual Stress of YSZ Thin Films.
这种薄膜具有很小的压应力，很低的针孔密度，良好的台阶覆盖性等优点。
The films have advantages of slightly compressive stress, very low pin-hole density and superior step coverage.
薄膜具有较低的残余应力和较好的热稳定性。
The AlN films have low residual stress and well thermal stability.
并对优化后的薄膜进行了应力分析和模态分析。
Moreover, the stress and mode analysis for the optimized film are made.
本文讨论一充气的薄膜圆球在两平行平面间接触加载时的变形与应力问题。
In this paper the deformation and stress of a pneumatic membrane sphere under contact loading between two parallel planes are discussed.
计算了薄膜在高功率脉冲激光作用下截面温度场和应力分布场。
The sectional temperature and stress distribution of optical films under high power pulse laser irradiation are calculated.
本文讨论温度及湿度对不同应力模式下低密度聚乙烯(LDPE)薄膜电强度的影响。
The present paper discusses the effect of temperature and humidity on the electric strength of low-density polyethylene (LDPE) film for various stressing modes.
生长的金刚石薄膜样品具有很低的压应力和优良的场电子发射性能。
The diamond film presents very low compressive stress and excellent field emission character.
本文简述了淀积于基片上的薄膜中的应力的计算理论的演变过程。
In this paper, the developmental process of the calculating theory of the stress in thin films on the same substrate is described briefly.
薄膜比块体材料的应变速率低，在同样的应力下应变更加困难。
However, the strain rates in thin films are smaller than those of bulk materials, making the strain more difficult under the same stress.
本文主要研究了钢板薄膜效应和预应力撑杆柱两项钢结构新技术。
In this dissertation, two new steel structure technologies in the aspects of membrane effect of steel and stayed column is researched and discussed.
提出了利用PVDF压电薄膜测量火炮发射过程中火药颗粒对弹底撞击应力方案，论述了该方案的可行性。
Solution was proposed in which PVDF piezoelectric film was used to detect the percussion force of powder grains to projectile base in launching environment, and the feasibility was discussed.
微型光栅结构薄膜中由于残余应力的存在引起器件在光学和机械性能方面发生显著变化。
Effects of residual stresses on the optical and mechanical performances of MEMS-based microgratings were investigated using finite element simulation method.
本发明公开了一种薄膜残余应力成分的分析装置。
The invention discloses a device for analyzing compositions of residual stress of a film.
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