建立了由微机械薄膜变形镜(MMDM)构成的微小型自适应光学系统，该系统具有低成本、低能耗、体积小的特点。
A microminiature adaptive optics system with a 37-channel micromachined membrane deformable mirror (MMDM) were built, which features low cost, low power consumption, small size.
运用有限元法对不同工况下平面薄膜反射镜的变形进行了计算。
By using finite element method, the deformations of flat membrane mirror have been calculated.
运用有限元法对不同工况下平面薄膜反射镜的变形进行了计算。
By using finite element method, the deformations of flat membrane mirror have been calculated.
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