动态随机存储器栅极侧壁硅化钨残留造成的短路成为制约提高产品良率及可靠性的瓶颈。
Dynamic random access memory (DRAM) suffers from the bridge issue due to the WSix residue on gate sidewall, which is the bottleneck to enhancing the product's yield and reliability.
所述CMOS图像传感器节约了工艺成本，提高了工艺良率，且对于各个波长的光都具有更好的吸收效率。
The CMOS image sensor saves the process cost, improves the process yield and has better absorption efficiency on light with various wavelengths.
因此，本发明不仅可提升产品良率以降低制作成本，且可满足薄膜晶体管液晶显示器日趋大型化、高画质化的需求。
So this invention can not only improve the product to reduce the cost but also meet the largely and the high quality demand of film transistor liquid crystal display device.
因此，本发明不仅可提升产品良率以降低制作成本，且可满足薄膜晶体管液晶显示器日趋大型化、高画质化的需求。
So this invention can not only improve the product to reduce the cost but also meet the largely and the high quality demand of film transistor liquid crystal display device.
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