对三种典型的铝硅双金属驱动膜片结构进行了有限元分析。
Three typical AlSi bimetal driving membrane structures are analyzed in this paper.
本文研究一种新颖的电磁力驱动的PD MS膜片泵，具有体积小，制作简单，控制精度高的特点。
A novel PDMS diaphragm micropump actuated by electromagnetic force is researched in this paper, which is small volume, easy manufacturing, and precise controlling.
通过不同的结构设计可以控制驱动膜片结构的弯曲变形方向。
Different deflection direction can be obtained through the different structure design.
通过不同的结构设计可以控制驱动膜片结构的弯曲变形方向。
The results show that the deflection direction, maximum center deflection of the membrane and the effective change of the volume all rely on the structure parameters.
通过不同的结构设计可以控制驱动膜片结构的弯曲变形方向。
The results show that the deflection direction, maximum center deflection of the membrane and the effective change of the volume all rely on the structure parameters.
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