建模结果表明，动态非线性模型比线性模型更为准确地描述了热膜(线)式空气质量流量传感器的动态特性。
The modeling results show that the nonlinear dynamic models are more accurate than the linear dynamic models to describe the sensor characteristics.
本课题采用MEMS工艺制作热膜式气体质量流量传感器，主要工作放在敏感头芯片部分的研制。
This task adopt MEMS technics to make Thermal -film air-mass sensor, mostly work is the study and facture of the sense organ of the chip.
本论文主要研究空燃比控制中的两种关键传感器：热膜式空气质量流量传感器和宽带型废气氧传感器的动态性能。
Two kinds of key sensors, hot-film mass air flow (MAF) sensor and universal exhaust oxygen gas sensor, for the AFR control are fully studied in this paper.
重点叙述了平膜应变式压力传感器弹性元件的选材特点、结构设计原理与最佳应力分布分析。
The material selection for elastomer, structure design principle and the analysis on optimal pressure distribution for the strain type pressure transmitter with plat membrane are described.
热膜式空气质量流量传感器存在动态非线性问题，必须建立动态非线性模型。
The non-linear dynamic model of the hot film MAF sensor must be built because the sensor possesses the nonlinear dynamic characteristics.
对谐振膜片进行了数学模型分析，并设计了基于数字闭环方法的谐振膜式密度传感器整体结构。
On basis of analyzing the mathematical models of resonant diaphragm, a integral structure of resonant diaphragm density sensor is designed based on the method of digital closed-loop.
对谐振膜片进行了数学模型分析，并设计了基于数字闭环方法的谐振膜式密度传感器整体结构。
On basis of analyzing the mathematical models of resonant diaphragm, a integral structure of resonant diaphragm density sensor is designed based on the method of digital closed-loop.
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