本文介绍了几种主要的膜厚测量仪器以及这些仪器的校准检测方法，并着重介绍了校准用膜厚标准的制定及应用。
This paper describes several main film thickness measurement tools with focus on the development and application of film thickness standard materials for calibration purposes.
本文介绍了几种主要的膜厚测量仪器以及这些仪器的校准检测方法，并着重介绍了校准用膜厚标准的制定及应用。
This paper describes several main film thickness measurement tools with focus on the development and application of film thickness standard materials for calibration purposes.
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