建立了平板型和球面型行星夹具膜厚均匀性的计算模型。
Calculating models for flat and spherical planetary fixture were developed.
研究结果表明，随着靶基距的增加，膜厚均匀性逐渐变好。
The results showed that the thickness uniformity becomes better along with the increasing target-substrate distance.
采用计算机计算了基片处于不同靶-基距时，膜厚均匀性的分布。
Based on it, some expressions of thickness uniformity were discussed, with the distribution of thickness uniformity calculated at different target-substrate distances.
优化工艺参数，通过调整补偿挡板使膜厚均匀性控制在3%以内。
The process flow is optimized through the adjustment of process parameters to get a good thickness uniformity of less than 3% by adjusting the compensation bezel.
最后给出了镀膜系统的关键设计参数，此镀膜系统能够满足ITRS关于膜厚均匀性的要求。
Finally, the key design parameters of coating system was obtained, this system can meet ITRS requirements on uniformity of film thickness.
研究了基片摆动和基片自转的磁控溅射系统中基片摆动角振幅和基片自转角速度对磁控溅射膜厚均匀性的影响。
The influence of rotation speed and pendulum amplitude on the thickness uniformity of film deposited by radio frequency magnetron sputtering system with rotation and pendulum was researched.
试验结果表明，使用LB - 20lf可提高涂膜的光泽和膜厚均匀性、改善了工件袋部的涂覆状况，可全面提高车体电泳涂层的质量。
Experimental results show that applying LB-20LF can obtain a uniform film with a high polish and improve the quality of electrophoretic coatings.
采用平面公自转行星夹具镀制户外照明用大面积光学薄膜，计算了光学薄膜膜厚的均匀性，经测试得到均匀性的结果。
Flat planetary holder is used in big area optical film for outdoor lighting and film thickness uniformity is counted in this paper. The result of uniformity is gained after testing.
采用平面公自转行星夹具镀制户外照明用大面积光学薄膜，计算了光学薄膜膜厚的均匀性，经测试得到均匀性的结果。
Flat planetary holder is used in big area optical film for outdoor lighting and film thickness uniformity is counted in this paper. The result of uniformity is gained after testing.
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