利用压阻效应、大(小)挠度理论、膜的应力形变等力学、电学知识设计了一种压阻式微压力传感器。
Based on the piezoresistive effect, large or small deflection theory, thin film's stress theory and other mechanics or electricity knowledge, a piezoresistive micro pressure sensor is designed.
根据模拟结果并结合单晶硅材料和SOI结构的特点，设计出了矩形应力膜单晶硅soi高温压力传感器芯片。
According to the result of simulation and characteristic of monocrystalline silicon SOI structure, a novel high temperature SOI pressure sensor with a rectangle diaphragm was designed.
提出了一种新的光纤压力传感器的设计，该传感器敏感膜采用了台面结构而非传统的平面结构。
A novel pressure sensor with a mesa structure diaphragm is presented, which has a mesa structure diaphragm rather than the planar one.
提出了场发射压力传感器阳极变形膜的双层膜结构。
The structure of two layer films for the anode sensing film of the field emission pressure sensors is presented.
评价性地论述了热激励硅谐振压力传感器和热激励谐振膜质量流量传感器。
It gives an exposition of the thermally excited silicon resonator pressure sensor and the thermally excited resonating membrane mass flow sensor.
重点叙述了平膜应变式压力传感器弹性元件的选材特点、结构设计原理与最佳应力分布分析。
The material selection for elastomer, structure design principle and the analysis on optimal pressure distribution for the strain type pressure transmitter with plat membrane are described.
厚膜混合集成压力传感器是在沈阳仪表科学研究院研制的。
The thick film hybrid integrated pressure sensor was developed in Shenyang Academy of Instrumentation Science.
厚膜混合集成压力传感器是在沈阳仪表科学研究院研制的。
The thick film hybrid integrated pressure sensor was developed in Shenyang Academy of Instrumentation Science.
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