分别采用聚氨酯抛光垫、聚四氟乙烯抛光垫、无纺布抛光垫抛光钽酸锂晶片，研究抛光垫材料性能对抛光效果影响。
To study the influence of pad material on polishing effect in polishing, polytetrafluoroethylene pad, non-woven fabric pad and polyurethane pad are selected.
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聚四氟乙烯板、棒、垫、膜。
Ptfe board, rods, mat, membrane.
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